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Comparative Study on Performance of IGZO Transistors With Sputtered and Atomic Layer Deposited Channel Layer

Cho, Min Hoe; Seol, Hyunju; Song, Aeran; Choi, Seonjun; Song, Yunheub; Yun, Pil Sang; Chung, Kwun-Bum; Bae, Jong Uk; Park, Kwon-Shik; Jeong, Jae Kyeong

ArticleIssue Date2019CitationIEEE TRANSACTIONS ON ELECTRON DEVICES, v.66, no.4, pp 1783 - 1788PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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