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Low temperature growth of SiGe epitaxial layers by rapid thermal vapor phase deposition
  • 조훈영
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Low temperature growth of SiGe epitaxial layers by rapid thermal vapor phase deposition
저자
조훈영
발행일
1999-10-06
학회명
International Conference on Advanced Materials and Devices '99
개최지
한양대
학회 개최일
1999-10-06 ~ 1999-10-08

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