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Interface Defects at the Si(100)/HfO2 Interface using DLTS Measurement

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Interface Defects at the Si(100)/HfO2 Interface using DLTS Measurement
저자
조훈영
발행일
2009-10-07
학회명
216th Elecrochemical Society meeting
개최지
오스트리아
학회 개최일
2009-10-04 ~ 2009-10-09

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