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Effects of Thermal Annealing on Dielectric Properties of High-k ZrO2 Layers Deposited on p-Ge Substrates

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Effects of Thermal Annealing on Dielectric Properties of High-k ZrO2 Layers Deposited on p-Ge Substrates
저자
김득영
발행일
2021-08-19
학회명
제61회 한국진공학회 하계정기학술대회
학회 개최일
2021-08-18 ~ 2021-08-20

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