Effects of Rapid Thermal Annealing on Dielectric Characteristics of High-k ZrO2 Grown on p-Ge
제목
Effects of Rapid Thermal Annealing on Dielectric Characteristics of High-k ZrO2 Grown on p-Ge
저자
이세준
발행일
2023-01-10
학회명
7th International Conference on Advances in Functional Materials
개최지
Kyushu University
학회 개최일
2023-01-09 ~ 2023-01-12