Transport properties for Si nanowire-channel MOSFETs formed with electron-beam-lithographically patterned ultra-narrow <100> and <110> Si wires

  • 김득영
제목
Transport properties for Si nanowire-channel MOSFETs formed with electron-beam-lithographically patterned ultra-narrow <100> and <110> Si wires
저자
김득영
발행일
2010-04-06
학회명
2010 Spring meeting on Material research society
개최지
모스콘 컨벤션센터
학회 개최일
2010-04-05 ~ 2010-04-09