Piezoelectric thin films: an integrated review of transducers and energy harvesting

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초록

Piezoelectric thin films offer a number of advantages in various applications, such as high energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as large displacement and low power consumption actuators. This review covers the available material forms and applications of piezoelectric thin films: lead zirconate titanate (PZT)-based thin films, lead-free piezoelectric thin films, piezopolymer films, cellulose-based electroactive paper (EAPap), and many other thin films used for electromechanical transduction. The electromechanical properties and performances of piezoelectric films are compared and their suitability for particular applications are reported. The key ideas of piezoelectric thin films are reviewed and discussed for sensory and actuation systems, energy harvesting, and medical and acoustic transducers. In the last section, an insight into the future outlook and possibilities for thin film-based devices and their integration into real-world applications is presented.

키워드

thin filmspiezoelectricssensorsactuatorsenergy harvestingMICROMACHINED ULTRASONIC TRANSDUCERSPULSED-LASER DEPOSITIONELECTROACTIVE PAPERPVDF FILMSTAINLESS-STEELCELLULOSESENSORPERFORMANCEFABRICATIONMEMS
제목
Piezoelectric thin films: an integrated review of transducers and energy harvesting
저자
Khan, AsifAbas, ZafarKim, Heung SooOh, Il-Kwon
DOI
10.1088/0964-1726/25/5/053002
발행일
2016-05
유형
Review
저널명
Smart Materials and Structures
25
5