Determination of Inelastic Collision Cross-Sections for C3F8 Molecule by Multi-term Boltzmann Equation Analysis

  • 하성철
제목
Determination of Inelastic Collision Cross-Sections for C3F8 Molecule by Multi-term Boltzmann Equation Analysis
저자
하성철
발행일
2000-07-13
학회명
한국전기전자재료학회 하계학술대회
학회 개최일
2000-07-13 ~ 2000-07-15