Determination of the electron collision cross section set for the C2F6 molecule

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초록

The electron drift velocity and the density-normalized longitudinal diffusion coefficient in the pure C2F6 molecule over the E/N range of 0.1-100 Td have been measured using a double shutter drift tube, where E is the electric field and N is the neutral number density. Our electron drift velocity values are in good agreement with those reported in a previous work on the C2F6 molecule. The negative differential conductivity phenomenon was found in the electron drift velocity. The results of our new measurements on the pure C2F6 molecule, along with the available electron transport coefficients, in 0.524 and 5.47 % C2F6 - Ar mixtures were used to successfully obtain the most reliable set of electron-collision cross sections for the C2F6 molecule by using a multi-term Boltzmann analysis.

키워드

Electron-collision cross sectionPerfluoroethane (C2F6) moleculeElectron swarm studyElectron-transport coefficientBoltzmann equation analysisCONTROLLED DIFFUSE DISCHARGESWITCHESPLASMASIMPEDANCEMIXTURESSILICONGASESSWARMC3F8SIO2
제목
Determination of the electron collision cross section set for the C2F6 molecule
저자
Pham Xuan HienDo Anh TuanJeon, Byung-Hoon
DOI
10.3938/jkps.69.1755
발행일
2016-12
유형
Article
저널명
Journal of the Korean Physical Society
69
12
페이지
1755 ~ 1761