Annealing Behaviors of Titanium Silicides by High Temperature Sputtering Method
  • 정웅
제목
Annealing Behaviors of Titanium Silicides by High Temperature Sputtering Method
저자
정웅
발행일
2000-11-01
학회명
The 10th Seoul International Symposium on the Physics of Semiconductors and Appl
개최지
제주그랜드호텔,제주
학회 개최일
2000-11-01 ~ 2000-11-03