ScholarWorks@동국대학교

상세 보기

Enhancement of electrical properties in metal thin film deposition via cryo pump

제목
Enhancement of electrical properties in metal thin film deposition via cryo pump
저자
정권범
발행일
2024-06-04
학회명
ISPSA 2024

ScholarWorks@동국대학교

04620 서울특별시 중구 필동로 1길 30 동국대학교 Tel. 02-2260-3114

COPYRIGHT © 동국대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.