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Suppression of defect states in poly Si for thin film based devices using proton and hellium implantation

  • 조훈영
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Suppression of defect states in poly Si for thin film based devices using proton and hellium implantation
저자
조훈영
발행일
2009-06-09
학회명
EMRS 2009
개최지
스트라스브르그
개최국가
독일
학회 개최일
2009-06-08 ~ 2009-06-12

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