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Crystalline In2O3 Deposited by PEALD for 3D Ferroelectric Field Effect Transistors Applications

제목
Crystalline In2O3 Deposited by PEALD for 3D Ferroelectric Field Effect Transistors Applications
저자
김현석
발행일
2025-06-17
학회명
GCIM 2025
개최국가
대한민국

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