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Fabrication of novel SiC nanopillars by ICP Etching
  • 이진구
제목
Fabrication of novel SiC nanopillars by ICP Etching
저자
이진구
발행일
2009-12-18
학회명
The 12th International Symposium on Microwave and Optical Technology (ISMOT-2009)
학회 개최일
2009-12-16 ~ 2009-12-19

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