Monolithic 3D Integration for Vertically Stacked IGZO-Te CMOS Inverters with a Via-Hole-Less structure

제목
Monolithic 3D Integration for Vertically Stacked IGZO-Te CMOS Inverters with a Via-Hole-Less structure
저자
김현석
발행일
2025-08-20
학회명
IMID 2025