ScholarWorks@동국대학교

상세 보기

Optimization of PEALD Al2O3 Deposition Temperature for High-Performance Thin-Film Transistors

제목
Optimization of PEALD Al2O3 Deposition Temperature for High-Performance Thin-Film Transistors
저자
김현석
발행일
2025-06-18
학회명
GCIM 2025
개최국가
대한민국

ScholarWorks@동국대학교

04620 서울특별시 중구 필동로 1길 30 동국대학교 Tel. 02-2260-3114

COPYRIGHT © 동국대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.