optical properties of diamond-like carbon films grown by PECVD with liquid hydrocarbons

제목
optical properties of diamond-like carbon films grown by PECVD with liquid hydrocarbons
저자
양우철
발행일
2008-08-27
학회명
14th ISPSA
개최지
라마다호텔
학회 개최일
2008-08-26 ~ 2008-08-29