Transport properties for Si nanowire-channel MOSFETs formed with electron-beam-lithographically patterned ultra-narrow <100> and <110> Si wires

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제목
Transport properties for Si nanowire-channel MOSFETs formed with electron-beam-lithographically patterned ultra-narrow <100> and <110> Si wires
저자
이세준
발행일
2010-04-07
학회명
2010 Materials Research Society Spring meeting
개최지
Moscone West and San Francisco Marriott
학회 개최일
2010-04-05 ~ 2010-04-09