Design and Fabrication of a MEMS-Based Multi-Sensor with Three Integrated Functions

  • 강태원
제목
Design and Fabrication of a MEMS-Based Multi-Sensor with Three Integrated Functions
저자
강태원
발행일
2008-08-27
학회명
The 14th International Symposium on the Physics of Semiconductors and Applications-2008
개최지
Ramada Plaza jeju Hotel
개최국가
대한민국
학회 개최일
2008-08-26 ~ 2008-08-29