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Optical properties of one-step and two-step rapid thermal annealed germanium-rich silicon oxide (grso) films prepared by rf magnetron sputtering

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Optical properties of one-step and two-step rapid thermal annealed germanium-rich silicon oxide (grso) films prepared by rf magnetron sputtering
저자
조훈영
발행일
2001-10-19
학회명
한국물리학회 가을연구논문발표회
개최지
전남대학교
학회 개최일
2001-10-19 ~ 2001-10-20

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