X-ray Diffraction Analysis of the Defect Structure in AlxGa1-xN Films Grown by Metalorganic Chemical Vapor Deposition

  • 강태원
제목
X-ray Diffraction Analysis of the Defect Structure in AlxGa1-xN Films Grown by Metalorganic Chemical Vapor Deposition
저자
강태원
발행일
2003-03-09
학회명
First Asia-Pacific Workshop on Widegap Semiconductors
개최지
AWAJI YUMEBUTAI International Conference Center
개최국가
일본
학회 개최일
2003-03-09 ~ 2003-03-12