Tailoring the Threshold Voltage Control of Oxide Thin-Film Transistor by Controlling Electron Injection using PN Semiconductor Heterojunction Structure
  • Han, Jung Hoon
  • Shin, Dong Yeob
  • Sung, Chihun
  • Cho, Sung Haeng
  • Ju, Byeong-Kwon
  • ... Chung, Kwun-Bum
  • 외 1명
Citations

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초록

The threshold voltage (VT) is the most important parameter in semiconductor devices. To control the VT of the thin-film transistors (TFTs), we propose heterojunction structure of p-type Tellurium (Te) and n-type Aluminum-Doped Indium-Zinc-Tin- Oxide (Al:IZTO) which acts as electron blocking layer and carrier transporting layer, respectively. We investigate the effect of adding the heterojunction layer on the Al:IZTO and demonstrate VT shift up to +20V by adjusting the thickness and single/double deposition of the heterojunction Te layer. © 2024, John Wiley and Sons Inc. All rights reserved.

키워드

Al:IZTOelectron trappingheterojunctionmetal-oxide thin film transistorstelluriumThreshold voltage
제목
Tailoring the Threshold Voltage Control of Oxide Thin-Film Transistor by Controlling Electron Injection using PN Semiconductor Heterojunction Structure
저자
Han, Jung HoonShin, Dong YeobSung, ChihunCho, Sung HaengJu, Byeong-KwonChung, Kwun-BumNam, Sooji
DOI
10.1002/sdtp.17824
발행일
2024-06
유형
Conference paper
저널명
Digest of Technical Papers - SID International Symposium
55
1
페이지
1452 ~ 1454