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Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films
- 제목
- Effects of He gas on hydrogen content and passivation of GaAs PHEMT with SiN films
- 저자
- 박현창
- 발행일
- 2000-06-28
- 학회명
- 2000 A-Pac Workshop on Fundamental&Application of Advanced Semiconductor Devices
- 개최지
- Okinawa
- 개최국가
- 일본
- 학회 개최일
- 2000-06-28 ~ 2000-06-30