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Fabrication of novel SiC nanopillars by ICP Etching
- 제목
- Fabrication of novel SiC nanopillars by ICP Etching
- 저자
- 카투
- 발행일
- 2009-12-18
- 학회명
- The 12th International Symposium on Microwave and Optical Technology (ISMOT-2009)
- 개최지
- Hotel Ashok
- 학회 개최일
- 2009-12-16 ~ 2009-12-19