상세 보기
Free-standing Si films as anode for lithium-ion batteries through ArF-dry photolithography and ICP-RIE etch process
- 제목
- Free-standing Si films as anode for lithium-ion batteries through ArF-dry photolithography and ICP-RIE etch process
- 저자
- 김현석
- 발행일
- 2023-11-03
- 학회명
- 2023년도 추계총회 및 학술발표회