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Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD

자키로브

제목: Effect of ultraviolet irradiation on the defect states and charge transport properties of low-k SiOC(-H) dielectric films deposited by UV-assisted PECVD

저자: 자키로브

발행일: 2010-07-27

학회명: 30th International Conference on the Physics of Semiconductors

개최지: 코엑스

학회 개최일: 2010-07-25 ~ 2010-07-30