Fabrication of arrayed metal oxide structures by electrochemical local oxidation using metallic tip with electric field and humidity

Abstract

Arrayed metal oxide structures were prepared using a simple metallic tip based local oxidation created by an electrochemical process between the metal tip and the substrate through ionized water molecules generated by a humidifier. CuO and WOx dots with diameter < 1 mu m were fabricated using copper and tungsten tips, respectively. A potential bias > -20 V with a humidity above 75% resulted in the formation of oxide dots. SEM, EDAX, XRD and laser Raman studies done on the fabricated structures confirmed the formation of metal oxide structures. The process of oxide formation and the effect of applied field and humidity on the property of oxide dot are studied.