Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Scaled Indium Oxide Thin-Film Deposited by PEALD for Ferroelectric-FET
- Authors
- 김현석
- Issue Date
- 6-Nov-2025
- Place
- 대한민국
- Conference Name
- 2025 한국표면분석학회
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Hyun Suk
- College of Engineering (Department of Energy and Materials Engineering)