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실리콘 나노-마이크로 구조 제작 방법 및 응용
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장재원 | - |
| dc.contributor.author | 조정식 | - |
| dc.date.accessioned | 2025-09-09T09:33:01Z | - |
| dc.date.available | 2025-09-09T09:33:01Z | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/61106 | - |
| dc.title | 실리콘 나노-마이크로 구조 제작 방법 및 응용 | - |
| dc.title.alternative | Method for fabrication of silicon nano-/microstructures and its applications | - |
| dc.type | Patent | - |
| dc.publisher.location | 대한민국 | - |
| dc.contributor.assignee | 동국대학교산학협력단 | - |
| dc.date.application | 2020-11-30 | - |
| dc.date.registration | 2022-10-06 | - |
| dc.type.iprs | 특허 | - |
| dc.identifier.patentRegistrationNumber | 10-2453534 | - |
| dc.identifier.patentApplicationNumber | 10-2020-0165054 | - |
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Related Researcher
- Jang, Jae Won
- College of Advanced Convergence Engineering (Division of System Semiconductor)