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Spin-On-Dielectric 물질을 이용한 반도체 소자의 Mesa 절연기술
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김삼동 | - |
| dc.contributor.author | 고필석 | - |
| dc.contributor.author | 박경석 | - |
| dc.date.accessioned | 2025-09-09T07:03:30Z | - |
| dc.date.available | 2025-09-09T07:03:30Z | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/59573 | - |
| dc.title | Spin-On-Dielectric 물질을 이용한 반도체 소자의 Mesa 절연기술 | - |
| dc.title.alternative | Mesa insulation technology using Spin-On-Dielectric materials in the semiconductor devices | - |
| dc.type | Patent | - |
| dc.publisher.location | 대한민국 | - |
| dc.contributor.assignee | 동국대학교산학협력단 | - |
| dc.date.application | 2014-07-11 | - |
| dc.date.registration | 2015-09-22 | - |
| dc.type.iprs | 특허 | - |
| dc.identifier.patentRegistrationNumber | 10-1556337 | - |
| dc.identifier.patentApplicationNumber | 10-2014-0087343 | - |
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