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Effects of Rapid Thermal Annealing on Dielectric Characteristics of High-k ZrO2 Grown on p-Ge
- Authors
- 이세준
- Issue Date
- 10-Jan-2023
- Place
- 일본
Kyushu University
- Conference Date
- 2023-01-09 ~ 2023-01-12
- Conference Name
- 7th International Conference on Advances in Functional Materials
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Related Researcher
- Lee, Se Joon
- College of Advanced Convergence Engineering (Division of System Semiconductor)