H2 Plasma Exposure Effect on 2DEG Density in AlGaN/GaN heterojunction Structure Grown on Silicon Substrate
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| DC Field |
Value |
Language |
| dc.contributor.author | 조훈영 | - |
| dc.date.accessioned | 2024-10-30T10:02:37Z | - |
| dc.date.available | 2024-10-30T10:02:37Z | - |
| dc.date.issued | 2011-10-20 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/45305 | - |
| dc.title | H2 Plasma Exposure Effect on 2DEG Density in AlGaN/GaN heterojunction Structure Grown on Silicon Substrate | - |
| dc.type | Conference | - |
| dc.citation.startPage | 77 | - |
| dc.citation.endPage | 77 | - |
| dc.citation.conferenceName | 한국물리학회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 컨벤션 | - |
| dc.citation.conferenceDate | 2011-10-19 ~ 2011-10-21 | - |
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