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MCS-BE법을 이용한 SiH4 가스 프라즈마중의 전자에너지...
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 하성철 | - |
| dc.date.accessioned | 2024-10-30T04:11:41Z | - |
| dc.date.available | 2024-10-30T04:11:41Z | - |
| dc.date.issued | 1997-04-25 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/39952 | - |
| dc.title | MCS-BE법을 이용한 SiH4 가스 프라즈마중의 전자에너지... | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | '97 춘계학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 동신대(나주) | - |
| dc.citation.conferenceDate | 1997-04-25 ~ 1997-04-26 | - |
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