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1Gbit급 다층 Cu 금속 배선 제작에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이진구 | - |
| dc.date.accessioned | 2024-10-30T03:52:07Z | - |
| dc.date.available | 2024-10-30T03:52:07Z | - |
| dc.date.issued | 1997-11-01 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/39564 | - |
| dc.title | 1Gbit급 다층 Cu 금속 배선 제작에 관한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 1997년도 추계종합학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 용인 | - |
| dc.citation.conferenceDate | 1997-11-01 | - |
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