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RF sputtering법에 의한 AIN 박막 형성 및 특성연구
- Authors
- 정웅
- Issue Date
- 15-Oct-1999
- Place
- 대한민국
부산 부경대
- Conference Date
- 1999-10-15 ~ 1999-10-16
- Conference Name
- 한국물리학회 1999년도 가을 학술논문발표회
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Collections - College of Advanced Convergence Engineering > ETC > 2. Conference Papers
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