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Low temperature growth of SiGe epitaxial layers by rapid thermal vapor phase deposition
- Authors
- 조훈영
- Issue Date
- 6-Oct-1999
- Place
- 대한민국
한양대
- Conference Date
- 1999-10-06 ~ 1999-10-08
- Conference Name
- International Conference on Advanced Materials and Devices '99
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Collections - College of Natural Science > Department of Physics > 2. Conference Papers
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