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Determination of Inelastic Collision Cross-Sections for C3F8 Molecule by Multi-term Boltzmann Equation Analysis
- Authors
- 하성철
- Issue Date
- 13-Jul-2000
- Place
- 대한민국
- Conference Date
- 2000-07-13 ~ 2000-07-15
- Conference Name
- 한국전기전자재료학회 하계학술대회
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