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P-Si기판 위에 형성된 SiO2/SiN/SiO2박막의 특성에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정웅 | - |
| dc.date.accessioned | 2024-10-30T02:11:54Z | - |
| dc.date.available | 2024-10-30T02:11:54Z | - |
| dc.date.issued | 2000-06-23 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/36531 | - |
| dc.title | P-Si기판 위에 형성된 SiO2/SiN/SiO2박막의 특성에 관한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 대한전자공학회 2000년도 하계종합학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 전남대/광주 | - |
| dc.citation.conferenceDate | 2000-06-23 ~ 2000-06-24 | - |
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