metal mask를 이용한 Si nanocrystal 형성과 열처리에 따른 결정화 특성연구

김득영

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metal mask를 이용한 Si nanocrystal 형성과 열처리에 따른 결정화 특성연구

Authors: 김득영

Issue Date: 19-Apr-2002

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/35116

Place: 대한민국
부산 컨벤션센터

Conference Date: 2002-04-19 ~ 2002-04-20

Conference Name: 2002년도 한국물리학회 봄 학술논문발표회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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