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MCS-BEq에 의한 SF6+Ar 혼합기체의 에너지 분포함수
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 하성철 | - |
| dc.date.accessioned | 2024-10-30T01:53:33Z | - |
| dc.date.available | 2024-10-30T01:53:33Z | - |
| dc.date.issued | 2002-07-08 | - |
| dc.identifier.uri | https://scholarworks.dongguk.edu/handle/sw.dongguk/34990 | - |
| dc.title | MCS-BEq에 의한 SF6+Ar 혼합기체의 에너지 분포함수 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 하계학술대회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 제주대 | - |
| dc.citation.conferenceDate | 2002-07-08 ~ 2002-07-10 | - |
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