반응성 RF 마그네트론 스퍼터법에 의한 ZnMnO 박막의 성장 및 특성연구

김득영

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반응성 RF 마그네트론 스퍼터법에 의한 ZnMnO 박막의 성장 및 특성연구

Authors: 김득영

Issue Date: 24-Oct-2003

URI: https://scholarworks.dongguk.edu/handle/sw.dongguk/34092

Place: 대한민국
경북대학교, 대구

Conference Date: 2003-10-24 ~ 2003-10-25

Conference Name: 한국물리학회 2003 가을 학술논문발표회

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Appears in Collections: College of Natural Science > Division of Physics & Semiconductor Science > 2. Conference Papers

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