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초박막 절연층을 가진 금속-절연체-금속 소자에서 Al과 Nb 전극에 따른 터널링 누설 전류 특성 연구
- Authors
- 임현식
- Issue Date
- 14-Feb-2008
- Place
- 대한민국
단국대학교 죽전캠퍼스
- Conference Date
- 2008-02-14 ~ 2008-02-15
- Conference Name
- 한국진공학회 제34회 동계학술대회
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Collections - College of Advanced Convergence Engineering > ETC > 2. Conference Papers
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