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Photonic sintering via flash white light combined with deep UV and NIR for SrTiO3 thin film vibration touch panel applications
- Issue Date
- 16-Dec-2016
- Publisher
- IOP PUBLISHING LTD
- Keywords
- vibration touch panel; SrTiO3; flash white light; near infrared; deep ultraviolet
- Citation
- NANOTECHNOLOGY, v.27, no.50
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- NANOTECHNOLOGY
- Volume
- 27
- Number
- 50
- ISSN
- 0957-4484
1361-6528
- Abstract
- An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO3 (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 degrees C-900 degrees C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.
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Related Researcher
- Lim, Soo Chul
- College of Engineering (Department of Mechanical, Robotics and Energy Engineering)