Nanomechanical logic elements based on coupled nanopillars

Abstract

We demonstrate the possibility of using coupled nanopillars as nanomechanical logic elements by regulating the flow of electric current between the nanopillars and the source and drain electrodes. The nanopillar, which is fabricated from a silicon-on-insulator (SOI) wafer and is located between two facing electrodes, oscillates with frequencies in the radiofrequency range of 10 - 1000 MHz. Electrons are transported between the nanopillar and the electrodes via an island-like gold layer thermally deposited on the top of the nanopillar in response to externally applied ac and dc biases. Nanomechanical logic gates are designed using the coupled nanopillars and a switched-capacitor model. With this configuration, several logic gates, such as an inverter and NAND, NOR, and XOR gates, can be effectively implemented.