Transparent and Flexible Mayan-Pyramid-based Pressure Sensor using Facile-Transferred Indium tin Oxide for Bimodal Sensor Applications

Abstract

Transparent and conducting flexible electrodes have been successfully developed over the last few decades due to their potential applications in optoelectronics. However, recent developments in smart electronics, such as a direct human-machine interface, health-monitoring devices, motion-tracking sensors, and artificially electronic skin also require materials with multifunctional properties such as transparency, flexibility and good portability. In such devices, there remains room to develop transparent and flexible devices such as pressure sensors or temperature sensors. Herein, we demonstrate a fully transparent and flexible bimodal sensor using indium tin oxide (ITO), which is embedded in a plastic substrate. For the proposed pressure sensor, the embedded ITO is detached from its Mayan-pyramid-structured silicon mold by an environmentally friendly method which utilizes water-soluble sacrificial layers. The Mayan-pyramid-based pressure sensor is capable of six different pressure sensations with excellent sensitivity in the range of 100 Pa-10 kPa, high endurance of 10(5) cycles, and good pulse detection and tactile sensing data processing capabilities through machine learning (ML) algorithms for different surface textures. A 5 x 5-pixel pressure-temperature-based bimodal sensor array with a zigzag-shaped ITO temperature sensor on top of it is also demonstrated without a noticeable interface effect. This work demonstrates the potential to develop transparent bimodal sensors that can be employed for electronic skin (E-skin) applications.