내부 기진력을 가지는 기계 구조물의 진동억제를 위한 능동진동제어 알고리듬 개발

Abstract

The resolution of display devices such as LCD and OLED is affected by the surface-finishing technology which uses a linear laser for crystallizing amorphous silicon to poly-silicon. Surface-finishing is carried out by the linear laser that radiates laser beam on a TFT panel. In doing so, the laser beam device is vibrated to form uniform distribution on the surface. However, the vibration of the laser beam device is transferred to a main structure and results in non-uniformity. Hence, the vibration of the main structure should be suppressed to guarantee the surface quality. In this study, the test bed similar to a real laser beam structure was built. The dynamic model was derived and active vibration control algorithms such as NAFC (negative acceleration feedback control), MHHC (modified higher harmonic control), and CFC (counter-force control) were considered. Since the excitation is known a priori, the hybrid control combines the NAFC and the CFC or the MHHC and the CFC. It is found both theoretically and experimentally that the hybrid control is effective to suppress vibrations of the main structure while the laser beam device is excited by harmonic disturbance.