Determination of the electron collision cross sections for the C2H4 molecule by using the electron swarm method

Abstract

A set of low-energy electron-collision cross sections for ethene (C2H4) is necessary for quantitative numerical modeling of plasma discharges for processing procedures with materials containing C2H4 molecules. The set was derived from the measured electron transport coefficients for a pure C2H4 molecule by using an electron swarm study and a two-term approximation to the Boltzmann equation for energy. The electron transport coefficients, which were calculated by using the derived set, are in good agreement with the experimental values over a wide range of E/N ratios in pure C2H4 molecule, where E is the electric field and N is the neutral number density. The validity of the present set of the C2H4 molecule was not only checked by using a Monte Carlo simulation but also evaluated by comparison with another set.