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Direct growth and interface reactions of ferroelectric Hf0.5Zr0.5O2 films on MoS2open access

Leem, Mirine; Eom, Deokjoon; Lee, Heesoo; Park, Kwangwuk; Jeong, Kwangsik; Kim, Hyoungsub

ArticleIssue Date2023CitationApplied Surface Science, v.629, pp 1 - 7PublisherELSEVIER
SCIESCOPUS
Three-Dimensional Surface Treatment of MoS2 Using BCl3 Plasma-Derived Radicalsopen access

Lee, Heesoo; Kim, Hoijoon; Kim, Kihyun; Jeong, Kwangsik; Leem, Mirine; Park, Seunghyun; Kang, Jieun; Yeom, Geunyoung; Kim, Hyoungsub

ArticleIssue Date2023CitationACS Applied Materials & Interfaces, v.15, no.39, pp 46513 - 46519PublisherAmerican Chemical Society
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