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Defect states in amorphous SiNx:H compounds using thermally stimulated exo-electron emission

Heo, Sung; Park, Hyoungsun; Chung, JaeGwan; Lee, Hyung Ik; Park, Jucheol; Kyoung, Yong Koo; Kim, Yong Su; Kim, KiHong; Byun, SunJung; Jeon, Woo Sung, et al.

ArticleIssue Date2016CitationTHIN SOLID FILMS, v.616, pp 850 - 855PublisherELSEVIER SCIENCE SA
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