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Analytical Calculation and Fabrication of FET-Embedded Capacitive Micromachined Ultrasonic Transducer

Park, Jin Soo; Kim, Jung Yeon; Lee, Ji-Hoon; Bae, Hee-Kyoung; Kim, Jinsik; Hwang, Kyo Seon; Park, Jung Ho; Choi, Rino; Lee, Byung Chul

ArticleIssue Date2017Citation2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)PublisherIEEE
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